Focusing on ArF PAGs, KrF PAGs, Photoresist Resins and Key Intermediates to Empower Advanced Semiconductor Manufacturing

Advanced Materials Power the Future Semiconductor Industry

Driven by the rapid advancement of artificial intelligence (AI), high-performance computing (HPC), advanced packaging, high-bandwidth memory (HBM) and advanced display technologies, the semiconductor industry faces surging demand for high-performance photolithography materials.

CHEMFISH has long specialized in advanced electronic materials and fine chemical supply chain services. By making sustained investments in semiconductor photolithography materials, the company has built a comprehensive product portfolio covering ArF PAGs, KrF PAGs, photoresist resins, photoinitiators (PIs), functional monomers and core intermediates. It delivers tailored professional solutions for semiconductor fabrication, advanced packaging, display panel manufacturing and electronic materials sectors.

What is PAG (Photoacid Generator)?

PAG (Photoacid Generator) is an essential functional material in modern photoresist systems.

During exposure at 193 nm (ArF) or 248 nm (KrF) wavelengths, PAG absorbs light energy and releases strong acid, which in turn triggers chemical amplification reactions to ultimately enable nanoscale pattern transfer.

Working Mechanism of PAG

UV Irradiation → PAG Absorbs Light  →  Acid Generation →  Chemical Amplification  →  Pattern Formation

Product Portfolio

ArF Photoacid Generator (ArF PAG)

ArF PAGs are designed for 193 nm advanced photolithography processes.

Primary Applications

• DRAM

• NAND Flash
• Logic Devices
• Advanced Packaging

Representative Products

• CAS 912290-04-1
• CAS 1228823-28-6
• CAS 1465790-38-8
• CAS 1146597-81-0
• CAS 1638216-03-1

Application Advantages

• High resolution
• Excellent linewidth control performance
• Compatible with advanced logic node processes
• Suitable for advanced packaging processes

 

DRAM

NAND Flash

Advanced Packaging

Display

KrF Photoacid Generator (KrF PAG)

KrF PAGs are developed for 248 nm photolithography processes.

Primary Applications

• Power semiconductors
• Analog ICs
• MEMS
• Display Driver ICs (DDIC)

Representative Products

• CAS 84563-54-2
• CAS 194999-85-4
• CAS 66003-78-9
• CAS 144317-44-2

Among them: CAS 84563-54-2 Bis(4-tert-butylphenyl)iodonium trifluoromethanesulfonate Widely adopted in KrF photoresist systems.

Photoresist Resins

CHEMFISH supplies the following resin products:

• PHS Resins
• Acrylic Resins
• BARC Resins
• Functional Copolymer Resins
• Chemically Amplified Resist Resins

Main Applications

• ArF Photoresists
• KrF Photoresists
• Display Photoresists
• Advanced Packaging

 

 

Photoinitiators (PI)

Main Applications

• LCD
• OLED
• UV curing systems
• Optical films
• Electronic materials

Representative Products

• CAS 253585-83-0
• CAS 82424-53-1
• CAS 852246-55-0
• CAS 1138028-44-0

Functional Monomers & Key Intermediates

Functional monomers and key intermediates serve as fundamental building blocks for manufacturing advanced photolithography materials.

Representative Products

• CAS 959312-47-1
• CAS 133710-62-0
• CAS 1227375-90-7
• CAS 1035539-18-4

Main Applications

• Photoresist Synthesis
• Functional Polymers
• Electronic Materials

Application Fields

Semiconductor Manufacturing

• Logic Devices
• DRAM
• NAND Flash
• CIS

Advanced Packaging

• Fan-Out Packaging
• WLP
• 2.5D Packaging
• 3D Packaging

Display Materials

• LCD
• OLED
• Micro LED

Optical Materials

• Optical Film
• UV Coating
• Functional Coating

DRAM | NAND Flash | Logic | Advanced Packaging | Display

 

Why Choose CHEMFISH

Product Portfolio

• Over 100 lithography-related materials

Quality Control

• Semiconductor-grade quality management system
• Strict control over trace metal impurities

Technical Support

• TDS (Technical Data Sheet) provision
• SDS (Safety Data Sheet) provision
• COA (Certificate of Analysis) provision
• Free sample supply service

Global Supply Chain Network

• Japan
• Mainland China
• South Korea
• Taiwan, China
• Europe
• United States

Custom R&D Services

• Custom synthesis of functional monomers
• Tailored PAG development
• Custom optimization of photoresist resins

 

About CHEMFISH

CHEMFISH is an international supply chain service enterprise specializing in advanced electronic materials, semiconductor chemicals, fluorochemicals and fine chemicals.

Our service coverage includes:

• Semiconductor manufacturing
• Advanced packaging
• Display industry
• Electronic materials
• Energy storage

We are committed to supplying high-purity specialty materials and professional technical support to customers worldwide.